B1500A 데이터 시트보기 (PDF) - HP => Agilent Technologies

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B1500A

Semiconductor Device Analyzer

HP => Agilent Technologies 

HPSMU module specifications

Voltage range, resolution, and accuracy (high resolution ADC)

Voltage

range

Force

Measure

resolution resolution

Force accuracy¹

±2 V

100 µV

2 µV

±(0.018 % + 400 µV)

±20 V

1 mV

20 µV

±(0.018 % + 3 mV)

±40 V

2 mV

40 µV

±(0.018 % + 6 mV)

±100 V

5 mV 100 µV

±(0.018 % + 15 mV)

±200 V

10 mV 200 µV

±(0.018 % + 30 mV)

1. ± (% of read value + offset voltage V)

Measure accuracy¹

±(0.01 % + 140 µV)

±(0.01 % + 140 µV)

±(0.01 % + 1 mV)

±(0.012 % + 2.5 mV)

±(0.014 % + 2.8 mV)

Maximum current

1A

1A

500 mA

125 mA

50 mA

Current range, resolution, and accuracy (high resolution ADC)

Current

Force

Measure

Force accuracy²

Measure accuracy²

Maximum voltage

range

resolution resolution¹

±1 nA

50 fA

10 fA

±(0.1 %+300 fA+1 fA x Vo)

±(0.1 %+300 fA+1 fA x Vo)

200 V

±10 nA

500 fA

10 fA

±(0.1 %+3 pA+10 fA x Vo)

±(0.1 %+2.5 pA+10 fA x Vo)

200 V

±100 nA

5 pA 100 fA

±(0.05 %+30 pA+100 fA x Vo)

±(0.05 %+25 pA+100 fA x Vo)

200 V

±1 µA

50 pA

1 pA

±(0.05 %+300 pA+1 pA x Vo)

±(0.05 %+100 pA+1 pA x Vo)

200 V

±10 µA

500 pA

10 pA

±(0.05 %+3 nA+10 pA x Vo)

±(0.04 %+2 nA+10 pA x Vo)

200 V

±100 µA

5 nA 100 pA

±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo)

200 V

±1 mA

50 nA

1 nA

±(0.04 %+150 nA+1 nA x Vo)

±(0.03 %+60 nA+1 nA x Vo)

200 V

±10 mA

500 nA

10 nA

±(0.04 %+1.5 nA+10 nA x Vo)

±(0.03 %+200 nA+10 nA x Vo)

200 V

±100 mA

5 µA 100 nA

±(0.045 %+15 µA+100 nA x Vo)

±(0.04 %+6 µA+100 nA x Vo)

³

±1 A

50 µA

1 µA

±(0.4 %+300 µA+1 µA x Vo)

±(0.4 %+150 µA+1 µA x Vo)

³

1. Specified measurement resolution is limited by fundamental noise limits.

2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))

3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.

Voltage range, resolution, and accuracy (high speed ADC)

Voltage

range

Force

Measure

resolution resolution

Force accuracy¹

±2 V

100 µV

2 µV

±(0.018 % + 400 µV)

±20 V

1 mV

20 µV

±(0.018 % + 3 mV)

±40 V

2 mV

40 µV

±(0.018 % + 6 mV)

±100 V

5 mV 100 µV

±(0.018 % + 15 mV)

±200 V

10 mV 200 µV

±(0.018 % + 30 mV)

1. ± (% of read value + offset voltage V)

Measure accuracy¹

±(0.01 % + 700 µV)

±(0.01 % + 4 mV)

±(0.015 % + 8 mV)

±(0.02 % + 20 mV)

±(0.035 % + 40 mV)

Maximum current

1A

1A

500 mA

125 mA

50 mA

5

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