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B1500A

Semiconductor Device Analyzer

HP => Agilent Technologies 

Atto-sense and switch unit

(ASU) specifications

AUX path specification

Maximum voltage

100 V (AUX input to AUX common)

100 V (AUX input to circuit common)

42 V (AUX common to circuit common)

Maximum current

0.5 A (AUX input to force output)

ASU supplemental information

Band width (at -3 dB)

30 MHz (AUX port)

SMU CMU unify unit (SCUU)

and guard switch unit (GSWU)

specifications

The SCUU multiplexes the outputs from

two SMUs (MPSMUs and/or HRSMUs)

and the CMU. The SCUU outputs are two

sets of Kelvin triaxial ports (Force and

Sense). The SCUU also allows the SMUs

to act as DC bias sources in conjunction

with the CMU. Special cables are available

to connect the SMUs and CMU with

the SCUU, and an auto-detect feature

automatically compensates for the cable

length going to the SCUU.

The GSWU contains a relay that auto-

matically opens for IV measurements and

closes for CV measurements, forming a

guard return path to improve CV measure-

ment accuracy.

Supported SMU

MPSMU and HRSMU

For SCUU

Inputs:

Triaxial ports: Force1, Sense1, Force2,

and Sense2

BNC ports: for MFCMU

Control port: for MFCMU

Outputs:

Triaxial ports: Force1/CMUH, Sense1,

Force2/CMUL, and Sense2

Control port: for GSWU

LEDs: SMU/CMU output status indicator

Docking mode:

Direct and indirect mode

For GSWU

Input:

Control port: for SCUU

Mini pin plug ports: Guard1, Guard2

Output:

LED: Connection status indicator

SCUU supplemental information

SMU path:

Offset current: < 20 fA

Offset voltage: < 100 µV at 300 sec

Closed channel residual resistance:

< 200 mΩ

Channel isolation resistance: > 1015 Ω

CMU path:

Test signal

Signal output level additional errors

(CMU bias, open load):

±2 % (direct docking)

±7 % (indirect docking)

Signal output level additional errors

(SMU bias, open load):

±5 % (direct docking, ≥ 10 kHz)

±10 % (indirect docking, ≥ 10 kHz)

Output impedance: 50 Ω, typical

Signal level monitor additional errors

(open load):

±2 % (CMU bias), direct docking

±5 % (SMU bias), direct docking

±7 % (CMU bias), indirect docking

±10 % (SMU bias), indirect docking

DC bias function

DC voltage bias (CMU bias):

Range: 0 to ±25 V

Resolution: 1 mV

Additional errors (for CMU bias):

±100 µV (open load)

DC voltage bias (SMU bias):

Range: 0 to ±100 V

Resolution: 5 mV

Additional errors (for SMU voltage

output accuracy): ±100 µV (open load)

DC bias monitor additional errors (open load):

±20 mV, direct docking

±30 mV, indirect docking

Output impedance:

50 Ω, typical

DC output resistance: 50 Ω (CMU bias),

130 Ω (SMU bias)

Measurement accuracy

Impedance measurement error is given by

adding the following additional error Ee to

the MFCMU measurement error.

Ee = ±(A + ZS/|ZX| + YO|ZX|) x 100 (%)

ZX: Impedance measurement value (Ω)

A: 0.05 % (direct docking) or

0.1 % (indirect docking)

ZS: 500 + 500 x f (mΩ)

YO: 1 + 1000 x f/100 (nS)

(direct docking, x2 for indirect docking)

Note: f is frequency in MHz.

When the measurement terminals are

extended by using the measurement cable,

the measurement accuracy is applied to

the data measured after performing the

open/short/load correction at the DUT

side cable end.

Note: The error is specified under the

following conditions:

Temperature: 23 °C ±5 °C

Integration time: 1 PLC or 16 PLC

10

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