3535 데이터 시트보기 (PDF) - ASM GmbH

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3535

LCR HiTESTER

ASM GmbH 

6

Measurement Accuracy and Range

Accuracy is calculated using Z and θ, and other parameters are calculated from these.

Z Accuracy: calculated from the following formula

Accuracy [%] = basic accuracy × frequency constant × level constant × measurement speed

constant × cable length constant × temperature constant

θ Accuracy: calculated from the following formula

Accuracy [degrees] = Z accuracy × 0.6

■ Basic Accuracy

Measurement

Range

9700-10 HEAD AMP UNIT

1 kΩ range

10 kΩ range

100 kΩ range

10 kΩ to 300 kΩ

A=2.00 B=0.20

1 kΩ to 20 kΩ

A=1.00 B=0.10

100 Ω to 2 kΩ A=0.50 B=0.10

100 mΩ to 100 Ω A=0.50 B=0.10

Upper end of range

( ) Basic accuracy = A + B ×

Zm × 10

range

-1

Lower end of range

( ) Basic accuracy = A + B ×

range

Zm × 10

-1

Zm = measurement value

■ Frequency Constant

log f+2 (f ≤ 10 MHz), where f is in MHz

10 × log f - 7 (f > 10 MHz), where f is in MHz

■ Cable Length Constant

1 (0m)

2 (2m, 9678)

■ Measurement Speed Constant

5 + 150/ V (FAST), where V is in mV

3 + 100/ V (NORMAL), where V is in mV

1.5 + 30/ V (SLOW), where V is in mV

1 (SLOW2)

■ Level Constant

10 - 3 × log V, where V is in mV

■ Temperature Constant

1 + 0.1 | T [°C] - 23 [°C] |

[Measurement Range: Reference Value]

Z • R*

C*

1 kΩ range 10 kΩ range

100 Ω to 2 kΩ

1k Ω to 20 kΩ

0.66 pF to 15.9 µF 0.066 pF to 1.59 nF

100 kΩ range

10 kΩ to 300 kΩ

4.4 fF to 159 pF

L* 0.133 nH to 3.18 mH 1.33 µH to 31.8 mH 13.3 µH to 477mH

θ

-180.00° to 180.00°

*Ranges for R, C, and L measurement are based on the data calculated from the

Z measurement range, and do not represent the guaranteed measurement ranges.

● Method of Acquiring Measurement Accuracy

Obtaining the basic accuracy of a

capacitor. (Cs=100pF)

Measurement value: Z = 159.33,

θ = -87.33° when measuring with the

following conditions using 1 kΩ range.

• Measurement Frequency: 10 MHz

• Measurement Speed: SLOW2

• Measurement Signal Level: 500 mV

• Cable Length: 0 m

• Temperature: 24°C

1. Acquire Z constants A and B from the basic

accuracy table, and calculate the basic accuracy

of Z.

2. Acquire the other constants from the

measurement conditions.

3. Acquire the accuracy of Z.

4. Calculate the basic accuracy of θ from the

basic accuracy of Z.

5. The range of possible values for Z and θ

is acquired from the basic accuracy. The

absolute value of θ is used.

6. The range of possible values for Cs is

acquired from the range of Z and θ .

X = Zsinθ, Cs = 1/ ωX

From the basic accuracy table, the constants A and B are A = 0.50 and B = 0.10

( ) Z basic accuracy = 0.50 + 0.10 ×

159.33 × 10 - 1 = ±0.559%

1000

Frequency constant = log(10) + 2 = 3

Level constant = 10 - 3 × log(500) ≈ 1.903

Measurement Speed constant = 1

Cable Length constant = 1

Temperature constant = 1 + 0.1 × |24 - 23| = 1.1

Z accuracy = 0.559 × 3 × 1.903 × 1 × 1 × 1.1 ≈ ±3.510%

θ accuracy = 3.510 × 0.6 = ±2.106°

Zmin = 159.33 × ( 1 - 3.510 / 100 ) ≈ 153.74Ω

Zmax = 159.33 × ( 1 + 3.510 / 100 ) ≈ 164.92Ω

θmin = 87.33 - 2.106 ≈ 85.224°

θmax =87.33 + 2.106 ≈ 89.436°

Csmin = 1 ÷ ( ω × Zmax × sinθmax ) ≈ 96.509 pF ...-3.491%

Csmax = 1 ÷ ( ω × Zmin × sinθmin ) ≈ 103.883 pF ...3.883%

ω = 2 × π × f, where f is the measurement frequency in Hz

Therefore, the basic accuracy of Cs is -3.491 to 3.883%.

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