LIS3L02AQ 데이터 시트보기 (PDF) - STMicroelectronics
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LIS3L02AQ Datasheet PDF : 9 Pages
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LIS3L02AQ
3 FUNCTIONALITY
The LIS3L02AQ is a low-cost, low-power, analog output three-axis linear accelerometer packaged in QFN pack-
age. The complete device includes a sensing element and an IC interface able to take the information from the
sensing element and to provide an analog signal to the external world.
3.1 Sensing element
The THELMA process is utilized to create a surface micro-machined accelerometer. The technology allows to
carry out suspended silicon structures which are attached to the substrate in a few points called anchors and
free to move on a plane parallel to the substrate itself. To be compatible with the traditional packaging tech-
niques a cap is placed on top of the sensing element to avoid blocking the moving parts during the molding
phase.
The equivalent circuit for the sensing element is shown in the figure below; when a linear acceleration is applied,
the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-bridge. This im-
balance is measured using charge integration in response to a voltage pulse applied to the sense capacitor.
Figure 4. Equivalent electrical circuit
Cps1
Rs1
S1x
Cs1x
Cpr
Rr
Cps2
Cps1
Cs2x
Rs2
Rs1
S2x
S1y
Cs1y
Cpr
Rr
rot
Cps2
Cs2y
Rs2
S2y
Cps1
Cpr
Rs1
Cs1z
Rr
S1z
Cps2
Cs2z
Rs2
S2z
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