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Die Characteristics
DIE DIMENSIONS:
88 mils x 88 mils
2240mm x 2240mm
METALLIZATION:
Type: AlSi
Metal 1 Thickness: 7.125kÅ ±1.125kÅ
Metal 2 Thickness: 9kÅ ±1kÅ
GLASSIVATION:
Type: SiO2
Thickness: 8kÅ ±1kÅ
WORST CASE CURRENT DENSITY:
< 2.0 x 105A/cm2
BOND PAD SIZE:
110µm x 110µm
4.3 mils x 4.3 mils
Metallization Mask Layout
ACTS161MS
ACTS161MS
CP
MR
VCC
TC
(2)
(1)
(16)
(15)
P0 (3)
P1 (4)
P2 (5)
P3 (6)
(14) Q0
(13) Q1
(12) Q2
(11) Q3
(7)
(8)
(9)
(10)
PE
GND
SPE
TE
3
Spec Number 518893