11 | Keysight | B1500A Semiconductor Device Analyzer - Data Sheet
MCSMU Module Specifications
Voltage range, resolution, and accuracy
Voltage
range
Force
resolution
Measure
resolution
Force accuracy 1
±(% + mV)
±0.2 V
200 nV
200 nV
±(0.06 + 0.14)
±2 V
2 µV
2 µV
±(0.06 + 0.6)
±20 V
±40 V2
20 µV
40 µV
20 µV
40 µV
±(0.06 + 3)
±(0.06 + 3)
1. ±(% of reading value + fixed offset in mV).
2. Maximum output voltage is 30 V.
Measure accuracy 1
(% + mV)
±(0.06 + 0.14)
±(0.06 + 0.6)
±(0.06 + 3)
±(0.06 + 3)
Current range, resolution, and accuracy
Current
range
Force
resolution
Measure
resolution
Force accuracy 1
(% + A + A)
±10 µA
10 pA
10 pA
±(0.06 + 2E-9 + Vo x 1E-10)
±100 µA
100 pA
100 pA
±(0.06 + 2E-8 + Vo x 1E-9)
±1 mA
1 nA
1 nA
±(0.06 + 2E-7 + Vo x 1E-8)
±10 mA
±100 mA
±1 A2
10 nA
100 nA
1 µA
10 nA
100 nA
1 µA
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
1. ±(% of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.
2. Pulse mode only. The maximum value of the base current during pulsing is ±50 mA.
Measure accuracy 1
(% + A + A)
±(0.06 + 2E-9 + Vo x 1E-10)
±(0.06 + 2E-8 + Vo x 1E-9)
±(0.06 + 2E-7 + Vo x 1E-8)
±(0.06 + 2E-6 + Vo x 1E-7)
±(0.06 + 2E-5 + Vo x 1E-6)
±(0.4 + 2E-4 + Vo x 1E-5)
Power consumption
Voltage source mode:
Voltage range
Power
0.2 V
40 x Ic (W)
2V
40 x Ic (W)
40 V
40 x Ic (W)
Where Ic is the current compliance setting.
MCSMU measurement and output range
Current (A)
1
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Current source mode:
0.1
Voltage
-30
compliance
Power
-0.1
Vc ≤ 0.2
40 x Io (W)
0.2 < Vc ≤ 2
40 x Io (W)
2 < Vc ≤ 40
40 x Io (W)
Where Vc is the voltage compliance setting and
Io is output current.
-1
Voltage (V)
30
Maximum
current
1A
1A
1A
1A
Maximum
voltage
30 V
30 V
30 V
30 V
30 V
30 V