MPXV2050 데이터 시트보기 (PDF) - Freescale Semiconductor

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MPXV2050

50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors

Freescale Semiconductor 

Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.

VS

3

X-ducer

Sensing

Element

Thin Film

Temperature

Compensation

and

Calibration

2 Vout+

4 Vout-

Pressure

1

GND

Figure 1. Temperature Compensated Pressure Sensor Schematic

Voltage Output vs. Applied Differential Pressure

The differential voltage output of the sensor is directly

proportional to the differential pressure applied.

The output voltage of the differential or gauge sensor

increases with increasing pressure applied to the pressure

side relative to the vacuum side. Similarly, output voltage

increases as increasing vacuum is applied to the vacuum

side relative to the pressure side.

On-Chip Temperature Compensation and Calibration

Figure 2 shows the minimum, maximum and typical output

characteristics of the MPXV2050 series at 25°C. The output

is directly proportional to the differential pressure and is

essentially a straight line.

A silicone gel isolates the die surface and wire bonds from

the environment, while allowing the pressure signal to be

transmitted to the silicon diaphragm.

40

35

30

25

20

15

10

5

0

-5

kPa 0

PSI

VS = 10 Vdc

TA = 25°C

MAX

12.5

1.8

TYP

MIN

25

37.5

3.6

5.4

SPAN

RANGE

(TYP)

50

OFFSET

7.25

(TYP)

Figure 2. Output vs. Pressure Differential

Sensors

Freescale Semiconductor

MPXV2050

3

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