C8000-10 데이터 시트보기 (PDF) - Hamamatsu Photonics

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C8000-10

BT(Back-thinned)-CCD Digital Camera

Hamamatsu Photonics 

DATA SHEET

BT(Back-thinned)-CCD

Digital Camera

C8000-10

The C8000 camera series employs an ultra high sensitive

back-thinned CCD sensor made by Hamamatsu. Espe-

cially in the UV, DUV and VUV wavelength ranges, the

C8000 series offers extremely high sensitivity never be-

fore realized by other scientific CCDs.

Spectral Response Characteristic of CCD chip*

(This is typical, not guaranteed. )

100

80

60

40

20

0

100 200 300 400 500 600 700 800 900 1000 1100 1200

Wavelength (nm)

* Without sapphire window. The spectral response with sapphire

window is decrease by the transmittance.

FEATURES

q Extremely high UV, DUV and VUV

sensitivity

q Quantum Efficiency of CCD chip

(This is typical, not guaranteed. ) **Calclated value

Excimer Laser

F2

ArF KrF

Wavelength (nm)

157

193

248

Quantum

Without sapphire

window

Efficiency(%) With sapphire

window

84

34 **

57

42 **

69

55 **

q Low dark noise with peltier cooling

q Binning function / Sub-array function

APPLICATIONS

q Beam Diagnostics of Stepper

Excimer Lasers: F2 (157 nm), ArF

(193 nm), KrF(248 nm)

q Development of UV optics

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